Four Point Probe Semi-Automated

Semi-Automated Four Point Probe Systems for Precise Resistivity Evaluation

CMT-SR5000

Semi-automated four point probe systems combine controlled probe positioning with repeatable measurement execution, improving throughput and consistency for resistivity characterization in R&D and process evaluation. 

Square & Round wafers mapping systems with different types of platform sizes. Measurement of resistivity, sheet resistance and calculate coating thickness. Completely integrated systems, direct indication of the calculated thickness, powerful graphical output of the results. Possible to measure over 5000 points on wafers.

Applications

Semi-automated four point probe systems are typically applied when:

  • For high-throughput and standardized measurement workflows
  • Ensures stable, reproducible results through controlled probe contact
  • Ideal for wafer and solar process environments
  • Suitable for both R&D

Measurement Capabilities

  • Automated probe positioning to defined coordinates
  • Repeatable contact and measurement sequencing
  • Support for diverse sample types and sizes
  • Samples sizes from 50mm up to 450mm

These features enable consistent resistivity measurement across research and development workflows.

Equipments

CMT-SR2000N

230mm (8”) wafer, 156x156mm

CMT-SR2000PV

CMT-SR2000PV

Specific for square samples

CMT-SR5000

CMT-SR5000

300mm (12”) wafer, 210x210mm

Probe Heads Settings

We can do specifics settings on probe heads depending on samples type

  • Tip radius of 12.5µm to 500µm
  • TipSpacing : 1mm, 1.591mm, 0.625mm
  • Preload settings from 10g to 200g

MDC Europe Support

MDC Europe configures semi-automated systems to match lab throughput and workflow requirements, providing guidance on measurement setup and process integration.

MDC-Europe_background

Why to Choose Our Products?

  • OEM-level refurbishment meeting original specifications
  • 30+ years of experience in semiconductor solutions
  • Fast European delivery and support
  • Comprehensive product portfolio from spares to systems
  • Trusted by leading OEMs and research institutes